技術(shù)描述、說明配置清單
Veeco IBE Nexus-350i C1
Model: Nexus-IBE 350
Veeco S/N:0806-581-568
Volts 208 Ph 3 AMPS 150 CYC 50/60
1x Refurbished Process Module
Polished stainless steel chamber:
Shields and Liners, Source Door
8 7/8” Pallet fixture with Flowcool, Clamp, Rotation (3-10 rpm) and Tilt (+90 deg to -75 deg)
Valve solenoid bank located in Facility Utility: SMC Devicenet
Tested Mech Pump and Turbo Pump:
Turbo Pump: Leybold MAG W 1300
Mech Pump: Oerilikon Leybold D65BCS
Gas、Vacuum、Source and Flowcool:
Gas lines and 3 MFCs:MKS 1x 10sccm, 2x 50sccm
Refurbished RF-350 Source with PBN and shutter
Forline gauge: GP275 Mini Conventron 275538-GD-T
Rough gauge: GP275 Mini Conventron 275538-GD-T
Chamber gauges: GP275 Mini Conventron 275538-GD-T and GP354
Flowcool He Gauge: MKS Baratron Manometer
Chiller: Polyscience DCW 304D1M01
1x Motion Box: Park Motion
1x I/O Net Module: Veeco I/O box
Power Supplies:
PBN Power Supplies:
1) Body: SORENSON DLM60-10
2) Discharge: SORENSON DLM60-10
3) Filament: SORENSON DCS20-150E
Ion Source Power Supplies:
1) Suppressor: SPELLMAN SL300
2) Beam: SPELLMAN SL1200
3) RF: Seren R2001
Computer: IBM E-server
PMflex Version:02.16.14.00
1x Front-end Rack:Computer: IBM E-server CTCflex V2.08.140
1x Main AC Power Cabinet: Veeco Power Cabinet
1x Refurbished Brooks 4-side Transfer Module: MX400
TM: Marathon Express 400 Palette Loader with 4 Pallets
One Loadlock with tested Palette elevator: Brooks, up to 4 Pallets
Vacuum:
Loadlock chamber gauge: GP275 Mini Conventron
Loadlock rough gauge: GP275 Mini Conventron
TM Chamber Gauge: GP354
Tested Mech Pump and Turbo Pump
1) Mech Pump: Oerilikon Leybold D16B
2) Turbo Pump:Varian 9698922
TMflex Version:1.06.06
